Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6032484 | Recovery of perfluorinated compounds from the exhaust of semiconductor fabs with recycle of vacuum pump diluent | Thomas Hsiao-Ling Hsiung, Alexander Schwarz, James H. C. Yang | 2000-03-07 |
| 5976222 | Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series | James H. C. Yang, Thomas Hsiao-Ling Hsiung, Alexander Schwarz | 1999-11-02 |
| 5730779 | Fluorochemical recovery and recycle using membranes | Thomas Hsiao-Ling Hsiung, Alexander Schwarz, James H. C. Yang | 1998-03-24 |