Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate heating apparatus with glass-ceramic panels and thin film ribbon heater element

Substrate heating apparatus with glass-ceramic panels and thin film ribbon heater element

US Patent 5911896 · Granted Jun 15, 1999

Estimated economic value: $5,104,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Temperature controlled ion source2019
Temperature controlled ion source2018
System and method for rotational transfer of articles between vacuum and non-vac2017
Force sensing system for substrate lifting apparatus2015
Electrode assembly for delivering a therapeutic agent into ocular tissue2014
Method and apparatus for beverage formation with pneumatically sealed reservoir2013
Techniques for changing temperature of a platen2012
Techniques for temperature controlled ion implantation2011
Techniques for temperature-controlled ion implantation2010
Beverage forming device with opening/closing mechanism for a beverage cartridge 2009
Wafer scanning system with reciprocating rotary motion utilizing springs and cou2007
Mechanical oscillator for wafer scan with spot beam2006