Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optical inspection module and method for detecting particles and defects on substrates in integrated process tools

Optical inspection module and method for detecting particles and defects on substrates in integrated process tools

US Patent 5909276 · Granted Jun 1, 1999

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Iterative liquid aspiration2025
Pipette tip extension, pipette tip, assembly of pipette tip and pipette tip exte2025
3D-printed mask for lysing at a location on a tissue section2025
Lawful interception of redirected calls2025
Method of treating a sample2025
Cartridge, electrowetting sample processing system and bead manipulation method2024
Pipette tip extension for treating a sample with a liquid attachable to a pipett2024
Cartridge and electrowetting sample processing system with delivery zone2024
Cartridge, electrowetting sample processing system and droplet formation2024
Lawful interception using service-based interfaces in communication systems2023
Cartridge, electrowetting sample processing system and bead manipulation method2023
Transmission of location information to devices along with wireless emergency al2023