Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Charged particle beam system with optical microscope

Charged particle beam system with optical microscope

US Patent 5905266 · Granted May 18, 1999

Estimated economic value: $84,315,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and system for testing an integrated circuit2021
Synchronized pulsed LADA for the simultaneous acquisition of timing diagrams and2021
High frequency lock-in thermography using single photon detectors2020
Synchronized pulsed LADA for the simultaneous acquisition of timing diagrams and2019
FIB milling of copper over organic dielectrics2011
Apparatus and method for optical interference fringe based integrated circuit pr2011
Methods and systems of performing device failure analysis, electrical characteri2010
FIB based open via analysis and repair2010
Apparatus and method for optical interference fringe based integrated circuit pr2010
Apparatus and method for circuit operation definition2009
Apparatus and method of forming silicide in a localized manner2008
Sub-resolution alignment of images2008