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Home › Method for anisotropically etching tungsten using SF.sub.6, CHF.sub.3, and N.sub.2

Method for anisotropically etching tungsten using SF.sub.6, CHF.sub.3, and N.sub.2

US Patent 5866483 · Granted Feb 2, 1999

Estimated economic value: $58,566,000 ⓘ

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