Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electrostatic chuck assembly

Electrostatic chuck assembly

US Patent 5838528 · Granted Nov 17, 1998

Estimated economic value: $1,326,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Fast, auto-cropping, bi-directional multi-resolution scanner apparatus, system a2008
Scanning system and method2002
Plasma enhanced chemical processing reactor and method2002
Plasma enhanced chemical processing reactor2001
Plasma enchanced chemical method1999
Plasma enchanced chemical method1999
Electrostatic support assembly having an integral ion focus ring1999
Gas injection system for semiconductor processing1998
Plasma enhanced chemical processing reactor and method1998
Electrostatic chuck assembly1998