Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and method for cleaning large glass plates using linear arrays of carbon dioxide (CO.sub.2) jet spray nozzles

Apparatus and method for cleaning large glass plates using linear arrays of carbon dioxide (CO.sub.2) jet spray nozzles

US Patent 5836809 · Granted Nov 17, 1998

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Wafer cleaning using a laser and carbon dioxide snow2000
Carbon dioxide jet spray disk cleaning system1998
Carbon dioxide liquid and gas sensor apparatus for use with jet spray cleaning s1998