Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6066032 | Wafer cleaning using a laser and carbon dioxide snow | Michael Borden, Charles W. Bowers | 2000-05-23 |
| 5836809 | Apparatus and method for cleaning large glass plates using linear arrays of carbon dioxide (CO.sub.2) jet spray nozzles | — | 1998-11-17 |
| 5806544 | Carbon dioxide jet spray disk cleaning system | — | 1998-09-15 |
| 5804826 | Carbon dioxide liquid and gas sensor apparatus for use with jet spray cleaning systems | Michael Borden | 1998-09-08 |