Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Oscillatory chuck method and apparatus for coating flat substrates

Oscillatory chuck method and apparatus for coating flat substrates

US Patent 5798140 · Granted Aug 25, 1998

Estimated economic value: $10,900,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for curing photoresist1998
Clustered photolithography system1997
Nozzle assembly for dispensing liquid1995
Drain arrangement for photoresist coating apparatus1994
Automatic inflation system1984
Tape cartridge with increased tape capacity1981
Tape cartridge1980