Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Exposure apparatus and device manufacturing method using the same

Exposure apparatus and device manufacturing method using the same

US Patent 5796469 · Granted Aug 18, 1998

Estimated economic value: $79,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of supporting and adjusting optical element in exposure apparatus2006
Supporting structure of optical element, exposure apparatus having the same, and2006
Supporting structure of optical element, exposure apparatus having the same, and2005
Driving device and exposure apparatus2004
Stage system and stage driving method for use in exposure apparatus2003
Stage system for exposure apparatus and device manufacturing method in which a s2002
Linear motor and stage system, and scanning exposure apparatus using the same2001
Projection and exposure apparatus including an optical member and a holding memb2000
Exposure apparatus2000
Scanning exposure method and apparatus for controlling acceleration and decelera2000
Stage apparatus and linear motor, and exposure apparatus and device production m2000
Reflecting system1999