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Home › Non-absorbing anti-reflective coated (ARC) reticle using thin dielectric films and method of forming the reticle

Non-absorbing anti-reflective coated (ARC) reticle using thin dielectric films and method of forming the reticle

US Patent 5780161 · Granted Jul 14, 1998

Estimated economic value: $1,471,000 ⓘ

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