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Home › Positive-working quinone diazide resist composition containing organic phosphoric compound and an amine and process for the formation of fine pattern using same

Positive-working quinone diazide resist composition containing organic phosphoric compound and an amine and process for the formation of fine pattern using same

US Patent 5716753 · Granted Feb 10, 1998

Estimated economic value: $165,000 ⓘ

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