Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer

Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer

US Patent 5600383 · Granted Feb 4, 1997

Estimated economic value: $11,113,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Microelectromechanical system (MEMS) devices with dielectric microstructure moti2014
Multilayered deformable element with reduced memory properties in a MEMS device2013
Stabilizer for MEMS devices having deformable elements2011
Sloping electrodes in a spatial light modulator2008
Memory architecture for micromirror cell2004
Support post architecture for micromechanical devices2002
Yield superstructure for digital micromirror device2001
Method of making a support post for a micromechanical device1998
Support post architecture for micromechanical devices1997
Low surface energy passivation layer for micromechanical devices1997
Multi-level digital micromirror device1996
Active yoke hidden hinge digital micromirror device1996