Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multilayered deformable element with reduced memory properties in a MEMS device

Multilayered deformable element with reduced memory properties in a MEMS device

US Patent 8472100 · Granted Jun 25, 2013

Estimated economic value: $4,096,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Stackable molecular spectroscopy cell2025
Rapid fiber optic alignment techniques for optical switching2025
Barrier structure within a microelectronic enclosure2025
Integrated filter optical package2025
Bias voltage adjustment for a phase light modulator2025
Microelectromechanical systems contact area reduction2024
Windowed wafer assemblies having interposers2024
Wet anisotropic etching of silicon2024
Isolated protrusion/recession features in microelectromechanical systems2024
Surface micromachined structures2023
Optical electronics device2023
Microelectromechanical system contactor spring2023