Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Process for continuous reactive metal oxide formation in vacuum

Process for continuous reactive metal oxide formation in vacuum

US Patent 5571574 · Granted Nov 5, 1996

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of thin film deposition under reactive conditions with RF or pulsed DC pl2004
Portable apparatus for thin deposition2000
Portable apparatus for thin deposition2000
Method for making plastic film with barrier layers1999
Method for making plastic film with barrier layers1999
Method of and apparatus for making plastic film with barrier layers1998
Method of and apparatus for making plastic film with barrier layers1998
Thin film deposition apparatus, mainly dedicated to PECVD and sputtering techniq1995
Thin film deposition apparatus, mainly dedicated to PECVD and sputtering techniq1995
Apparatus for continuous reactive metal deposition in vacuum with web looping ov1995
Apparatus for continuous reactive metal deposition in vacuum with web looping ov1995
Thin film multilayer structure as permeation barrier on plastic film1995