Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Non-centric improved pumping stage for turbomolecular pumps

Non-centric improved pumping stage for turbomolecular pumps

US Patent 5456575 · Granted Oct 10, 1995

Estimated economic value: $4,804,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Centripetal pumping stage and vacuum pump incorporating such pumping stage2012
Spiral pumping stage and vacuum pump incorporating such pumping stage2011
Sputtering apparatus with a rotating magnet array having a geometry for specifie2000
Turbomolecular pump1997
Collimated deposition apparatus and method1997
Physical vapor deposition employing ion extraction from a plasma1996
Tangential flow pumping channel for turbomolecular pumps1995
Tangential flow pumping channel for turbomolecular pumps1995
Pumping state turbomolecular pumps1995
Collimated deposition apparatus and method1994
Rotating sputtering apparatus for selected erosion1993
Turbomolecular pump1993