Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer carrier for film planarization

Wafer carrier for film planarization

US Patent 5449316 · Granted Sep 12, 1995

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Back pressure control system for CMP and wafer polishing2008
Method of backgrinding wafers while leaving backgrinding tape on a chuck2006
Back pressure control system for CMP and wafer polishing2006
Method of backgrinding wafers while leaving backgrinding tape on a chuck2005
Method for making a polishing pad with built-in optical sensor2004
Method for applying an insert or tape to chucks or wafer carriers used for grind2003
Wafer-handling apparatus having a resilient membrane which holds wafer when a va1995