Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Etch control seal for dissolved wafer micromachining process

Etch control seal for dissolved wafer micromachining process

US Patent 5437739 · Granted Aug 1, 1995

Estimated economic value: $21,491,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multi-purpose electrical coil as a magnetic flux generator, heater or degauss co2015
Heating elements with reduced stray magnetic field emissions2004
Method for fabricating a sealed-cavity microstructure2003
Flow heater2002
Precisely defined microelectromechanical structures and associated fabrication m2001
Sealed-cavity microstructure and microbolometer and associated fabrication metho2001
Method of anodic wafer bonding1999
Epitaxial layer for dissolved wafer micromachining process1998
Etch control seal for dissolved wafer process1996