Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Sealed-cavity microstructure and microbolometer and associated fabrication methods

Sealed-cavity microstructure and microbolometer and associated fabrication methods

US Patent 6252229 · Granted Jun 26, 2001

Estimated economic value: $110,475,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multi-purpose electrical coil as a magnetic flux generator, heater or degauss co2015
Interface device for extending camcorder use over the electromagnetic spectrum2006
Heating elements with reduced stray magnetic field emissions2004
Method for fabricating a sealed-cavity microstructure2003
Method for fabricating a sealed-cavity microstructure2003
Method for fabricating a sealed-cavity microstructure2003
Flow heater2002
Pixel structure having a bolometer with spaced apart absorber and transducer lay2001
Precisely defined microelectromechanical structures and associated fabrication m2001
Method of anodic wafer bonding1999
Epitaxial layer for dissolved wafer micromachining process1998
Etch control seal for dissolved wafer process1996