Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Barrier enhancement at the salicide layer

Barrier enhancement at the salicide layer

US Patent 5412250 · Granted May 2, 1995

Estimated economic value: $2,560,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Manufacture of an integrated circuit isolation structure2001
System and method for residue entrapment utilizing a polish and sacrificial fill2001
Methods of forming pairs of transistors, and methods of forming pairs of transis1999
Sputter deposition with mobile collimator1999
Integrated-circuit via formation using gradient photolithography1997
Integrated circuit contact barrier formation with ion implant1996
Magnet assembly for enhanced sputter target erosion1994
Design for sputter targets to reduce defects in refractory metal films1993