Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Modular luminescence-based measuring system using fast digital signal processing

Modular luminescence-based measuring system using fast digital signal processing

US Patent 5351268 · Granted Sep 27, 1994

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Encapsulated instrumented substrate apparatus for acquiring measurement paramete2023
Encapsulated instrumented substrate apparatus for acquiring measurement paramete2023
Instrumented substrate apparatus2023
Instrumented substrate apparatus for acquiring measurement parameters in high te2021
In-situ temperature sensing substrate, system, and method2021
Process condition sensing device and method for plasma chamber2020
Process condition sensing device and method for plasma chamber2020
Etch-resistant coating on sensor wafers for in-situ measurement2020
Encapsulated instrumented substrate apparatus for acquiring measurement paramete2019
Encapsulated instrumented substrate apparatus for acquiring measurement paramete2019
Method and system for measuring radiation and temperature exposure of wafers alo2019
Method and system for measuring radiation and temperature exposure of wafers alo2019