Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Device fabrication entailing plasma-derived x-ray delineation

Device fabrication entailing plasma-derived x-ray delineation

US Patent 5339346 · Granted Aug 16, 1994

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Holder, system, and process for improving overlay in lithography2005
Lithographic process for device fabrication using dark-field illumination2002
Lithographic process for device fabrication using a multilayer mask which has be2000
Optical lithographical imaging system including optical transmission diffraction1998
High resolution remote position detection using segmented gratings1997
Sub-micron through-the-lens positioning utilizing out of phase segmented grating1997
Pattern delineating apparatus for use in the EUV spectrum1996
Device fabrication using DUV/EUV pattern delineation1996
Fluoresence imaging1996
Device fabrication entailing synchrotron radiation1995
Compounds, vectors and methods for expressing human, cytosolic phospholipase A.s1994
Optical lithographical imaging system including optical transmission diffraction1994