Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for vapor deposition

Method and apparatus for vapor deposition

US Patent 5200021 · Granted Apr 6, 1993

Estimated economic value: $215,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Normally-off mode polarization super junction GaN-based field effect transistor 2025
Hetero-junction bipolar transistor and electric device2018
Semiconductor device having a polarization super junction field effect transisto2018
Polarization super-junction low-loss gallium nitride semiconductor device2014
Semiconductor device2008
Heterojunction bipolar transistor with a base layer that contains bismuth2006
Heterojunction bipolar transistor with a base layer that contains bismuth2006
Heterojunction bipolar transistor with a base layer that contains bismuth2005
Semiconductor device2005
Semiconductor device and its manufacturing method2005
Method for growing a nitride compound semiconductor2004
Semiconductor laminated substrate, semiconductor crystal substrate and semicondu2004