Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Illuminator for microlithographic integrated circuit manufacture

Illuminator for microlithographic integrated circuit manufacture

US Patent 5166530 · Granted Nov 24, 1992

Estimated economic value: $4,492,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System metrology core2013
Apparatus and method for protecting, installing and removing mercury-vapor lamps1992