Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Fabrication method in vertical integration

Fabrication method in vertical integration

US Patent 5166091 · Granted Nov 24, 1992

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Optical device with two cylindrically symmetric mirrors2015
Polyelectrolyte dispensing polishing pad2006
Polyelectrolyte dispensing polishing pad, production thereof and method of polis2005
Method for forming an integrated barrier/plug for a stacked capacitor2002
Slurry-less chemical-mechanical polishing of oxide materials2002
Compositions for and method of reducing/eliminating scratches and defects in sil2001
Methods for enhancing the metal removal rate during the chemical-mechanical poli2000
Semiconductor structure including a conductive fuse and process for fabrication 2000
Method of integrated circuit fabrication including a step of depositing tungsten1997
Metal oxide semiconductor transistors having a polysilicon gate electrode with n1996
Self-aligned method of fabrication closely spaced apart metallization lines1995
Aluminum metallization doped with iron and copper to prevent electromigration1993