Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Microwave chemical vapor deposition apparatus and feedback control method

Microwave chemical vapor deposition apparatus and feedback control method

US Patent 5069928 · Granted Dec 3, 1991

Estimated economic value: $21,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Work vehicle with dust intrusion prevention mechanism2025
Work vehicle2025
Method for producing high-protein milk raw material2025
Work vehicle2025
Work vehicle2025
Working machine2023
Photoelectric conversion apparatus, manufacturing method thereof, and image pick2016
Leak judgment method, and computer-readable recording medium with recorded leak-2010
Method and apparatus for forming fluoride thin film2009
Wet process gas treatment apparatus2007
Transparent conductive film formation process, photovoltaic device production pr2005
Long-Term sputtering method2005