Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Photolithographic processes using thin coatings of refractory metal silicon nitrides as antireflection layers

Photolithographic processes using thin coatings of refractory metal silicon nitrides as antireflection layers

US Patent 5066615 · Granted Nov 19, 1991

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Process for producing high quality bio-oil in high yield2019
Catalyst system having meso and macro hierarchical pore structure2019
Process for conversion of biomass in multi-zone reactor2017
Method of producing mixed metal oxide catalyst system2017
Catalyst for thermocatalytic conversion of biomass to liquid fuels and chemicals2017
Biomass catalytic cracking catalyst and process of preparing the same2016
Process for converting biomass to a fuel2015
Two-stage reactor and process for conversion of solid biomass material2015
Process for preparing a fluidizable biomass-catalyst composite material2015
Refractory mixed-metal oxides and spinel compositions for thermo-catalytic conve2014
Bio-oil having reduced mineral content, and process for making2014
Modification of biomass for efficient conversion to fuels2013