Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Capacitive accelerometer with mid-plane proof mass

Capacitive accelerometer with mid-plane proof mass

US Patent 5008774 · Granted Apr 16, 1991

Estimated economic value: $8,713,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Crustaceans as production systems for therapeutic proteins2011
Transfected shrimp as production systems for therapeutic proteins2009
Sensor having direct-mounted sensing element1996
Sensor having direct-mounted sensing element1996
Capacitive pressure sensor having a reduced area dielectric spacer1995
Capacitive pressure sensor having a reduced area dielectric spacer1995
Method of manufacturing silicon pressure sensor having dual elements simultaneou1995
Reference element for high accuracy silicon capacitive pressure sensor1995
Capacitive pressure sensor having a substrate with a curved mesa1995
Capacitive pressure sensor having a substrate with a curved mesa1995
Silicon capacitive pressure sensor having a glass dielectric deposited using ion1994
Methodology for manufacturing hinged diaphragms for semiconductor sensors1993