Capacitive pressure sensor having a substrate with a curved mesa

Assignee

• RTX (Raytheon)

Inventors

• Paul L. Provenzano (3 patents)
• James L. Swindal (16 patents)
• Robert J. Kuhlberg (2 patents)
• Charles B. Brahm (3 patents)
• Harold D. Meyer (3 patents)
• Frank W. Gobetz (4 patents)
• Walter J. Wiegand (15 patents)
• Robert H. Bullis (20 patents)

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