Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Bipolar sinker structure and process for forming same

Bipolar sinker structure and process for forming same

US Patent 5001538 · Granted Mar 19, 1991

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Process modulation to prevent structure erosion during gap fill2007
Dynamic modification of gap fill process characteristics2007
Gap fill for high aspect ratio structures2006
Gap fill for high aspect ratio structures2004
Gap fill for high aspect ratio structures2003
Process for producing a high performance bipolar structure1999
Process for making a self-aligned bipolar sinker structure1993
Process for making a self-aligned bipolar sinker structure1993
Plasma etch process for single-crystal silicon with improved selectivity to sili1984
Process for dislocation-free slot isolations in device fabrication1984