Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Rotatable substrate supporting susceptor with temperature sensors

Rotatable substrate supporting susceptor with temperature sensors

US Patent 4996942 · Granted Mar 5, 1991

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Rotatable substrate supporting mechanism with temperature sensing device for use1999
Rotatable substrate supporting mechanism with temperature sensing device for use1999
Electrochromic edge isolation-interconnect system, process, and device for its m1997
Chemical vapor desposition system1995
Chemical vapor desposition system1995
Rotatable substrate supporting mechanism with temperature sensing device for use1995
Rotatable substrate supporting mechanism with temperature sensing device for use1995
Rotatable substrate supporting mechanism with temperature sensing device for use1994
Rotatable substrate supporting mechanism with temperature sensing device for use1994
Substrate supporting apparatus1994
Substrate supporting apparatus1994
Reaction chambers for CVD systems1993