{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Plasma etching reactor with reduced plasma potential", "item": "https://www.patentleaderboard.com/patent/4600464"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025

Plasma etching reactor with reduced plasma potential

US Patent 4600464 · Granted Jul 15, 1986

Estimated economic value: $24,897,000

Assignee

Inventors

View full patent text on Google Patents →