Assignee
Inventors
- Brian H. Desilets (13 patents)
- Thomas Günther (9 patents)
- Charles J. Hendricks (12 patents)
- John H. Keller (51 patents)
{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Plasma etching reactor with reduced plasma potential", "item": "https://www.patentleaderboard.com/patent/4600464"}]}
Skip to contentUS Patent 4600464 · Granted Jul 15, 1986