Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Tailoring of novolak and diazoquinone positive resists by acylation of novolak

Tailoring of novolak and diazoquinone positive resists by acylation of novolak

US Patent 4564575 · Granted Jan 14, 1986

Estimated economic value: $33,933,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods, devices, systems, and compositions for detecting gases2019
Methods to determine a bearing setting2018
Orally dissolving thin films containing allergens and methods of making and use2017
Method and system for detecting the level of anesthesia agent in an anesthesia v2013
Antireflective coating for microlithography2001
Process for forming carbonates of hydroxyaromatic compounds2000
Process for forming carbonates of hydroxyaromatic compounds2000
Top antireflective coating film2000
Highly sensitive positive photoresist composition2000
Phase-averaging resist coating for reflectivity control1999
Antireflective coating films1998
Method for patterning a photoresist material wherein an anti-reflective coating 1998