{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "High vacuum compatible air bearing stage", "item": "https://www.patentleaderboard.com/patent/4417770"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High vacuum compatible air bearing stage

High vacuum compatible air bearing stage

US Patent 4417770 · Granted Nov 29, 1983

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

E beam stage with below-stage X-Y drive1985
Electron-beam stage X-Y positioning instrumentation1983