Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4516029 | E beam stage with below-stage X-Y drive | — | 1985-05-07 |
| 4417770 | High vacuum compatible air bearing stage | — | 1983-11-29 |
| 4378482 | Electron-beam stage X-Y positioning instrumentation | — | 1983-03-29 |