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Home › Passivation of RIE patterned al-based alloy films by etching to remove contaminants and surface oxide followed by oxidation

Passivation of RIE patterned al-based alloy films by etching to remove contaminants and surface oxide followed by oxidation

US Patent 4368220 · Granted Jan 11, 1983

Estimated economic value: $47,565,000 ⓘ

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