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Home › Molecular beam deposition technique using gaseous sources of group V elements

Molecular beam deposition technique using gaseous sources of group V elements

US Patent 4330360 · Granted May 18, 1982

Estimated economic value: $19,430,000 ⓘ

Assignee

Bell Telephone Laboratories

Inventors

Glenn D. Kubiak (9 patents)
Morton B. Panish (6 patents)

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