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Home › Method for removing borosilicate and boron rich oxides from a silicon body prior to doping silicon bodies with a SiB.sub.6 solid source

Method for removing borosilicate and boron rich oxides from a silicon body prior to doping silicon bodies with a SiB.sub.6 solid source

US Patent 4313773 · Granted Feb 2, 1982

Estimated economic value: $24,132,000 ⓘ

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