Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for determining an imaging quality of an optical system when illuminated by illumination light within an entrance pupil to be measured

Method for determining an imaging quality of an optical system when illuminated by illumination light within an entrance pupil to be measured

US Patent 12492963 · Granted Dec 9, 2025

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for measuring a reflectivity of an object for measurement light and metro2025
Method for determining an imaging quality of an optical system when illuminated 2025
Diffractive optical element, method for designing an efficiency-achromatized dif2025
Method for reproducing a target wavefront of an imaging optical production syste2024
Polymers for the treatment of surfaces2024
Reducing image artifacts in images2023
Metrology system for examining objects with EUV measurement light2023
Material testing of optical test pieces2023
Segmented optical system for a lighting module for angle-resolved illumination2023
Material testing by angle-variable illumination2022
Illumination module for angle-selective illumination2022
Digital determination of focus position2022