Automated batch production thin film deposition systems and methods of using the same

Assignee

• Veeco Instruments

Inventors

• Michael W. Pacier (3 patents)
• Michael J. Sershen (7 patents)
• Adam Bertuch (4 patents)
• Laurent Lecordier (6 patents)
• Thousif Ahamad Khan Hosakote Buden (1 patents)
• Ramesh Prasad Manchaladore Narahari Rao (1 patents)

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