Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400894 | Automated batch production thin film deposition systems and methods of using the same | Michael W. Pacier, Michael J. Sershen, Laurent Lecordier, Thousif Ahamad Khan Hosakote Buden, Ramesh Prasad Manchaladore Narahari Rao | 2025-08-26 |
| D908102 | Transportable semiconductor wafer rack | Michael W. Pacier, Michael J. Sershen, Laurent Lecordier | 2021-01-19 |
| D908103 | Transportable semiconductor wafer rack | Michael W. Pacier, Michael J. Sershen, Laurent Lecordier | 2021-01-19 |
| 10844488 | Chuck systems and methods having enhanced electrical isolation for substrate-biased ALD | Michael J. Sershen | 2020-11-24 |