Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma treatment apparatus

Plasma treatment apparatus

US Patent 12387908 · Granted Aug 12, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma processing device, and plasma processing method2025
Plasma processing apparatus, high-frequency power supply circuit, and impedance 2025
Plasma processing apparatus and plasma processing method2025
Plasma processing apparatus and plasma processing method2025
Film forming apparatus2024
Plasma processing device, and plasma processing method2024
Temperature measurement system, temperature measurement method, and substrate pr2024
Plasma processing apparatus2022
Substrate processing method2022
Substrate processing apparatus2022
Plasma processing apparatus and plasma processing method2022
Plasma processing apparatus and plasma processing method2021