Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pellicle film, pellicle, exposure original plate, exposure device, and method for manufacturing pellicle film

Pellicle film, pellicle, exposure original plate, exposure device, and method for manufacturing pellicle film

US Patent 12386252 · Granted Aug 12, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Imaging condition determination method, imaging condition determination system, 2025
Measurement apparatus, information processing apparatus, data specifying method,2025
Pellicle, exposure master, exposure device and method for manufacturing semicond2023
Supporting frame for pellicle, pellicle, method for manufacturing same, exposure2022
Pellicle support frame, pellicle, method for manufacturing pellicle support fram2021
Pellicle, exposure original plate, exposure device, and semiconductor device man2021
Pellicle film, pellicle frame, pellicle, method for producing same, original pla2021
Pellicle manufacturing method and method for manufacturing photomask with pellic2021
Pellicle frame, pellicle containing same, method for producing pellicle frame, a2020
Pellicle, pellicle production method and exposure method using pellicle2020
Pellicle, production method thereof, exposure method2019
Pellicle film, pellicle frame, pellicle, and method for producing same2019