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Home › EUV mask inspection device, EUV mask inspection method, non-transitory computer-readable medium storing EUV mask inspection program, and EUV mask inspection system including a gray image based on design data of a pattern

EUV mask inspection device, EUV mask inspection method, non-transitory computer-readable medium storing EUV mask inspection program, and EUV mask inspection system including a gray image based on design data of a pattern

US Patent 12361536 · Granted Jul 15, 2025

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