Dielectric isolation structure for multi-gate transistors

Assignee

• TSMC

Inventors

• Jen-Hong Chang (8 patents)
• Yuan-Ching Peng (56 patents)
• Chung-Ting Ko (64 patents)
• Kuo-Yi Chao (58 patents)
• Chia-Cheng Chao (15 patents)
• You-Ting Lin (13 patents)
• Chih-Chung Chang (38 patents)
• Yi-Hsiu Liu (16 patents)
• Jiun-Ming Kuo (42 patents)
• Sung-En Lin (24 patents)

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