Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing apparatus including shower head and edge ring and related methods of manufacturing semiconductor devices

Substrate processing apparatus including shower head and edge ring and related methods of manufacturing semiconductor devices

US Patent 12293901 · Granted May 6, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for executing and cancelling function by using flexible UI and user respo2025
Substrate processing apparatus, semiconductor manufacturing equipment, and subst2025
Apparatus and method for drying substrate2025
Wafer processing equipment and method of manufacturing semiconductor device2025
Substrate heating apparatus and method for processing a substrate2025
Apparatus for drying wafer and method for drying wafer2025
Substrate processing method, micropattern forming method, and substrate processi2024
Wafer processing apparatus and wafer processing method using the same2024
Apparatus for processing a substrate2024
Hollow cathode, an apparatus including a hollow cathode for manufacturing a semi2023
Apparatus including light source supplying light to wafer and window protector r2023
Substrate processing apparatus, semiconductor manufacturing equipment, and subst2023