Inertial sensor and method for manufacturing the same

Assignee

• Denso
• Toyota
• Mirise Technologies

Inventors

• Keitaro ITO (9 patents)
• Shota HARADA (8 patents)
• Katsuaki Goto (9 patents)
• Yuuki Inagaki (10 patents)
• Teruhisa Akashi (36 patents)
• Hirofumi Funabashi (23 patents)
• Takahiko Yoshida (84 patents)
• Yusuke Kawai (83 patents)

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