Transistors with recessed silicon cap and method forming same

Assignee

• TSMC

Inventors

• Yen-Ting Chen (94 patents)
• Bo-Yu Lai (34 patents)
• Chien-Wei Lee (37 patents)
• Hsueh-Chang Sung (99 patents)
• Wei-Yang Lee (193 patents)
• Feng-Cheng Yang (212 patents)
• Yen-Ming Chen (299 patents)

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