Post gate dielectric processing for semiconductor device fabrication

Assignee

• TSMC

Inventors

• Chih-Yu Hsu (33 patents)
• Jian-Hao Chen (120 patents)
• Chia-Wei Chen (92 patents)
• Shan-Mei Liao (15 patents)
• Hui-Chi Chen (50 patents)
• Cheng Hong Yang (5 patents)
• Shih-Hao Lin (120 patents)
• Kuo-Feng Yu (99 patents)
• Feng-Cheng Yang (212 patents)
• Yen-Ming Chen (299 patents)

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