Semiconductor devices with a nitrided capping layer

Assignee

• TSMC

Inventors

• Po-Chin Chang (28 patents)
• Lin-Yu Huang (140 patents)
• Shuen-Shin Liang (54 patents)
• Sheng-Tsung Wang (54 patents)
• Cheng-Chi Chuang (209 patents)
• Chia-Hung Chu (60 patents)
• Tzu-Pei Chen (9 patents)
• Yuting CHENG (6 patents)
• Sung-Li Wang (109 patents)

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